Electrical Characterization
- Parameter Analyzer (4200A)
- Wafer Probe station
Parameter Analyzer (4200A)
NAME OF INSTRUMENT: PARAMETER ANALYSER
COMPANY: M/S TEKTRONIX ASIA LTD
MODEL: KEITHLEY 4200A-SCS
APPLICATIONS: This instrument has I-V Source Measure Units (100 fA measure resolution), C-V Capacitance Measure Units (1 kHz – 10 MHz) and Pulsed I-V Ultra-fast Pulse Measure Units ( 200 MS/s, 5 ns sampling rate).
Specifications
| Parameter | Technical Specification |
|---|---|
| Source Measure Units (SMUs) | ±200 μV / 1pA or ±200 V / 1 A |
| Current Resolution: Measure/Source | 100 aA to 50 nA / 1.5 fA to 5 μA |
| Operation Mode | 4-quadrant sourcing and measuring |
| Connections | 2-wire or 4-wire |
| C-V Unit (CVU) | |
| Range | 0.1 pF – 1 μF |
| Frequency Range | 1 kHz – 10 MHz |
| DC Bias Range | ±30 V / 1 mV resolution |
| Measurement Types | C-V, C-f |
| Pulsed I-V Unit (PMU) | |
| Channels | 2 |
| Voltage/Current Range | 40 V / (100 nA to 200 mA) |
| Minimum Pulse Width | 100 ns |
Wafer Probe station
NAME OF INSTRUMENT: PROBE STATION
COMPANY: M/S FORMFACTOR INC. (GERMANY)
MODEL: EPS 150 FA
APPLICATIONS: It is equipped with DC probers and DC probes. We can perform current-voltage (IV), pulsed I-V and capacitance-voltage (CV) measurements on semiconductor devices like diodes, transistors, photodiodes and solar cells.
Specifications
| Parameter | Specification |
|---|---|
| Instrument Name | EPS150FA Formfactor Probe Station |
| Wafer Size Capacity | Up to 150 mm (6 inches) |
| System Type | Manual probing solution |
| Chuck Stage | Vacuum Chuck, X-Y movement capability of 155 mm × 155 mm, Z movement adjustable up to 10 mm |
| Microscope | Mounted on microscope bridge with X-Y movement of 50 mm × 50 mm, Pneumatic Z tilt lift, Digital CMOS camera with at least 8 MP resolution |
| Probe Arms | Configurable for various measurement types (e.g., DC, RF) |
| Vibration Isolation | Integrated vibration isolation for stable measurements |
| Measurement Capability | 50 pA of current or better |
